Precision coating pursuing uniformity of application
Viscosity: several cp to 10,000 cp
Substrate size: G8 size
*Coating experiments available
【Device Features】
Target Substrate: G8 Size
Coating Materials and Viscosity
- Various chemicals, resists, resin-based materials, etc.
- Viscosity: a few cp to 10,000 cp
- Film Thickness: 1 to 100 μm
Main Applications and Examples
- Universities, research and development institutions, AIST, material and materials development, precision parts, optical components
- Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals
【Test Experiment Equipment】
- Clean booth (installed within a clean room)
- Slit coater 400×500 mm
- Tabletop spin coater Φ500 series (compatible with inner cup method)
- Tabletop spin coater Φ300 series
- Hot plate
- Film thickness measurement device